Scanning Probe Techniques for Engineering Nanoelectronic Devices
نویسندگان
چکیده
microscopy-based techniques is enabling new ways to build and investigate nanoscale electronic devices. Here we review several advanced techniques to characterize and manipulate nanoelectronic devices using an atomic force microscope (AFM). Starting from a carbon nanotube (CNT) network device that is fabricated by conventional photolithography (micron-scale resolution) individual carbon nanotubes can be characterized, unwanted carbon nanotubes can be cut, and an atomic-sized transistor with single molecule detection capabilities can be created. These measurement and manipulation processes were performed with the MFP-3DTM AFM with the Probe Station Option and illustrate the recent progress in AFM-based techniques for nanoelectronics research.
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